By Dennis G. Fisher, I. J. Bahl
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Additional info for Gallium Arsenide Ic Applications Handbook
At present about 15,000 MMIC chips are being produced per year for the advanced air-to-air missiles. 6 COMMERCIAL SYSTEM APPLICATIONS GaAs monolithic IC technology is finding wide applications in upgrade versions of existing and next-generation high-volume commercial systems up to 100 GHz as shown in Fig. 5. The widespread usage is taking place due to high-yield manufacturing of GaAs monolithic ICs, high performance, high reliability, and small size. A number of potential applications of monolithic ICs in the mmW frequency range (30 to 100 GHz) have also been identified [18-25].
GPS (navigation, guidance, and mapping) and data transmission using VSAT systems are also carried through satellites. Cellular telephones which connect anybody anywhere in the world through low Earthorbit (LEO) satellites will bring another dimension to our dependency on satellites. VSAT offers privately owned communication networks to handle data transfer, facsimile, video, and voice. This satellite-based network will be used for data gathering and transfer, data applications, file retrieval, electronic mail and banking, real-time inventory control, message store and forward, point of sale, credit-card verification, etc.
10 Multifunction self-aligned gate (MSAG) FET cross section showing features to improve manufacturability. 16 lnder Bah/and Dennis Fisher Ion Implantation ] (i) Implant Si~ (ii) Deposit Si3N4 (iii)Anneal at 850~ I Gateand ResistorFormationI TiWN Evaporation I ...... 9 Ohmic Contact I liil) Ni/AuGe Evaporation I First-LevelMetal I TiPdAu Evaporation I w DieleCtricDepOsitiOn I CVD Si3N4 I Second-LevelMetal I (i) TiWN/Au Evaporation (ii) Au Plating I Via Hold and Backside Plating I Alloying (i) Via Hole Etching (ii) Au Plating FIG.
Gallium Arsenide Ic Applications Handbook by Dennis G. Fisher, I. J. Bahl